Nano positioning measurement or feedback over centimeters range are needed for 1 or 2 axes applications in MEMS and Nano-technology applications. Conventional methods due to the low accuracy or short travel range may not meet the current requirement. Recently, Optodyne has developed a new LDS1000HS, which is a high performance Laser Doppler Displacement meter with high laser frequency stability of 0.01 ppm, high positioning accuracy of 0.1 ppm and high signal-to-noise ratio. This high performance laser system is designed for positioning feedback or calibration of such ultra-precision stages.
The laser frequency stability is better than 0.01 ppm, the resolution is 1 nm. The major features are: high resolution and high accuracy, non-contact and no need for periodic calibration.
The laser system, LDS1000HS, consists of a laser head, a processor box, a power supply box, a retroreflector and cable set.
Optodyne, a California corporation, develops, manufactures and markets laser-based precision measurement equipment for machine tool calibration, metrology, OEM, and other industrial applications that require precision measurement through a worldwide distribution network. Optodyne is ISO/IEC 17025 accredited, which requires a quality system similar to ISO 9000, plus testing and calibration equipment, as well as knowledgeable testing and calibration personnel.
Optodyne, Inc., 1180 Mahalo Place, Rancho Dominguez, CA 90220, Tel 310/635-7481, Fax 310/635-6301, www.optodyne.com, or www.optodyne-usa.com.