Veeco Instruments Sends MBE System to Univ. of Okla.

First University to Receive GENxplor Deposition System for Research

Veeco Instruments Inc. will send its first shipment of its GENxplor R&D Molecular Beam Epitaxy (MBE) System the University of Oklahoma early in the fourth quarter.

The GENxplor is a fully integrated deposition system that creates high quality epitaxial layers on substrates up to 3” in diameter and can be used for cutting edge research on a wide variety of materials including GaAs, nitrides, and oxides.

“The University of Oklahoma is proud to be the first university in the world that will have the new GENxplor,” saysDr. Michael Santos, University of Oklahoma Professor in Engineering Physics. “The proven growth chamber and enhanced features of the GENxplor, including robust process flexibility and convenient access to effusion cells, are ideal for the materials research we are conducting for technologies such as lasers, photo detectors, and solar cells. We have two other Veeco MBE systems in our lab that have performed very well.”


“The University of Oklahoma is at the forefront of compound semiconductor materials research, so it is quite fitting that they are receiving the first GENxplor,” comments Jim Northup, vice president, General Manager of Veeco’s MBE Operations. “It has been designed specifically for the R&D community, combining an easy to use platform with our world-class MBE performance.”

Source: Veeco